7/12/2010	11:11:08 AM	Bypass valve closed
7/12/2010	11:11:09 AM	Main Vac valve closed
7/12/2010	11:11:44 AM	Main Vac valve opened
7/12/2010	11:11:45 AM	Main Vac valve closed
7/12/2010	11:11:52 AM	Helium valve opened
7/12/2010	11:11:58 AM	Helium valve closed
7/12/2010	11:11:59 AM	Helium valve opened
7/12/2010	11:11:59 AM	Helium valve closed
7/12/2010	11:12:15 AM	H2 valve opened
7/12/2010	11:12:16 AM	H2 valve closed
7/12/2010	11:12:17 AM	H2 valve opened
7/12/2010	11:12:18 AM	H2 valve closed
7/12/2010	11:12:19 AM	H2 valve opened
7/12/2010	11:12:19 AM	H2 valve closed
7/12/2010	11:12:19 AM	H2 valve opened
7/12/2010	11:12:23 AM	H2 valve closed
7/12/2010	11:12:23 AM	H2 valve opened
7/12/2010	11:12:24 AM	H2 valve closed
7/12/2010	11:12:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/12/2010	11:12:41 AM	Recipe started at 11:12 AM
7/12/2010	11:12:41 AM	Helium valve closed
7/12/2010	11:12:41 AM	H2 valve closed
7/12/2010	11:12:41 AM	BCl3 valve closed
7/12/2010	11:12:41 AM	PH3 valve closed
7/12/2010	11:12:41 AM	SiCl4 pre valve closed
7/12/2010	11:12:41 AM	SiCl4 post valve closed
7/12/2010	11:12:41 AM	Main Vac valve closed
7/12/2010	11:12:41 AM	Bubbler valve closed
7/12/2010	11:12:41 AM	Bypass valve opened
7/12/2010	11:12:41 AM	Helium MFC set to  0.000000
7/12/2010	11:12:41 AM	H2 MFC set to  0.000000
7/12/2010	11:12:41 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:41 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:41 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:41 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:41 AM	Tube furnace set to 0
7/12/2010	11:12:41 AM	Helium valve closed
7/12/2010	11:12:41 AM	H2 valve closed
7/12/2010	11:12:41 AM	BCl3 valve closed
7/12/2010	11:12:41 AM	PH3 valve closed
7/12/2010	11:12:41 AM	SiCl4 pre valve closed
7/12/2010	11:12:41 AM	SiCl4 post valve closed
7/12/2010	11:12:41 AM	Bubbler valve closed
7/12/2010	11:12:41 AM	Main Vac valve opened
7/12/2010	11:12:41 AM	Bypass valve opened
7/12/2010	11:12:41 AM	Helium MFC set to  0.000000
7/12/2010	11:12:41 AM	H2 MFC set to  0.000000
7/12/2010	11:12:41 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:41 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:41 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:41 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:41 AM	Tube furnace set to 0
7/12/2010	11:12:43 AM	H2 valve closed
7/12/2010	11:12:43 AM	BCl3 valve closed
7/12/2010	11:12:43 AM	PH3 valve closed
7/12/2010	11:12:43 AM	SiCl4 pre valve closed
7/12/2010	11:12:43 AM	SiCl4 post valve closed
7/12/2010	11:12:43 AM	Bubbler valve closed
7/12/2010	11:12:43 AM	Helium valve opened
7/12/2010	11:12:43 AM	Main Vac valve opened
7/12/2010	11:12:43 AM	Bypass valve opened
7/12/2010	11:12:43 AM	Helium MFC set to  100.000000
7/12/2010	11:12:43 AM	H2 MFC set to  0.000000
7/12/2010	11:12:43 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:43 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:43 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:43 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:43 AM	Tube furnace set to 0
7/12/2010	11:12:44 AM	Helium valve closed
7/12/2010	11:12:44 AM	H2 valve closed
7/12/2010	11:12:44 AM	BCl3 valve closed
7/12/2010	11:12:44 AM	PH3 valve closed
7/12/2010	11:12:44 AM	SiCl4 pre valve closed
7/12/2010	11:12:44 AM	SiCl4 post valve closed
7/12/2010	11:12:44 AM	Bubbler valve closed
7/12/2010	11:12:44 AM	Main Vac valve opened
7/12/2010	11:12:44 AM	Bypass valve opened
7/12/2010	11:12:44 AM	Helium MFC set to  0.000000
7/12/2010	11:12:44 AM	H2 MFC set to  0.000000
7/12/2010	11:12:44 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:44 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:44 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:44 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:44 AM	Tube furnace set to 0
7/12/2010	11:12:44 AM	H2 valve closed
7/12/2010	11:12:44 AM	BCl3 valve closed
7/12/2010	11:12:44 AM	PH3 valve closed
7/12/2010	11:12:44 AM	SiCl4 pre valve closed
7/12/2010	11:12:44 AM	SiCl4 post valve closed
7/12/2010	11:12:44 AM	Bubbler valve closed
7/12/2010	11:12:44 AM	Helium valve opened
7/12/2010	11:12:44 AM	Main Vac valve opened
7/12/2010	11:12:44 AM	Bypass valve opened
7/12/2010	11:12:44 AM	Helium MFC set to  100.000000
7/12/2010	11:12:44 AM	H2 MFC set to  0.000000
7/12/2010	11:12:44 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:44 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:44 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:44 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:44 AM	Tube furnace set to 0
7/12/2010	11:12:45 AM	Helium valve closed
7/12/2010	11:12:45 AM	H2 valve closed
7/12/2010	11:12:45 AM	BCl3 valve closed
7/12/2010	11:12:45 AM	PH3 valve closed
7/12/2010	11:12:45 AM	SiCl4 pre valve closed
7/12/2010	11:12:45 AM	SiCl4 post valve closed
7/12/2010	11:12:45 AM	Bubbler valve closed
7/12/2010	11:12:45 AM	Main Vac valve opened
7/12/2010	11:12:45 AM	Bypass valve opened
7/12/2010	11:12:45 AM	Helium MFC set to  0.000000
7/12/2010	11:12:45 AM	H2 MFC set to  0.000000
7/12/2010	11:12:45 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:45 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:45 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:45 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:12:45 AM	Tube furnace set to 0
7/12/2010	11:12:45 AM	Run aborted at 11:12 AM
7/12/2010	11:12:45 AM	Helium valve closed
7/12/2010	11:12:45 AM	H2 valve closed
7/12/2010	11:12:45 AM	BCl3 valve closed
7/12/2010	11:12:45 AM	PH3 valve closed
7/12/2010	11:12:45 AM	SiCl4 pre valve closed
7/12/2010	11:12:45 AM	SiCl4 post valve closed
7/12/2010	11:12:45 AM	Bypass valve closed
7/12/2010	11:12:45 AM	Main Vac valve closed
7/12/2010	11:12:45 AM	Bubbler valve closed
7/12/2010	11:12:45 AM	Helium MFC set to  0.000000
7/12/2010	11:12:45 AM	H2 MFC set to  0.000000
7/12/2010	11:12:45 AM	BCl3 MFC set to  0.000000
7/12/2010	11:12:45 AM	PHl3 MFC set to  0.000000
7/12/2010	11:12:45 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:12:45 AM	Tube furnace set to 0
7/12/2010	11:12:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/12/2010	11:13:03 AM	Recipe started at 11:13 AM
7/12/2010	11:13:03 AM	Helium valve closed
7/12/2010	11:13:03 AM	BCl3 valve closed
7/12/2010	11:13:03 AM	PH3 valve closed
7/12/2010	11:13:03 AM	SiCl4 pre valve closed
7/12/2010	11:13:03 AM	SiCl4 post valve closed
7/12/2010	11:13:03 AM	Main Vac valve closed
7/12/2010	11:13:03 AM	Bypass valve closed
7/12/2010	11:13:03 AM	Bubbler valve closed
7/12/2010	11:13:03 AM	H2 valve opened
7/12/2010	11:13:03 AM	Helium MFC set to  0.000000
7/12/2010	11:13:03 AM	H2 MFC set to  500.000000
7/12/2010	11:13:03 AM	BCl3 MFC set to  0.000000
7/12/2010	11:13:03 AM	PHl3 MFC set to  0.000000
7/12/2010	11:13:03 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:13:03 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:13:03 AM	Tube furnace set to 0
7/12/2010	11:13:23 AM	Run aborted at 11:13 AM
7/12/2010	11:13:23 AM	Helium valve closed
7/12/2010	11:13:23 AM	H2 valve closed
7/12/2010	11:13:23 AM	BCl3 valve closed
7/12/2010	11:13:23 AM	PH3 valve closed
7/12/2010	11:13:23 AM	SiCl4 pre valve closed
7/12/2010	11:13:23 AM	SiCl4 post valve closed
7/12/2010	11:13:23 AM	Bypass valve closed
7/12/2010	11:13:23 AM	Main Vac valve closed
7/12/2010	11:13:23 AM	Bubbler valve closed
7/12/2010	11:13:23 AM	Helium MFC set to  0.000000
7/12/2010	11:13:23 AM	H2 MFC set to  0.000000
7/12/2010	11:13:23 AM	BCl3 MFC set to  0.000000
7/12/2010	11:13:23 AM	PHl3 MFC set to  0.000000
7/12/2010	11:13:23 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:13:23 AM	Tube furnace set to 0
7/12/2010	11:13:53 AM	Program exited cleanly
7/12/2010	11:13:55 AM	Program started normally
7/12/2010	11:13:55 AM	Helium valve closed
7/12/2010	11:13:55 AM	H2 valve closed
7/12/2010	11:13:55 AM	BCl3 valve closed
7/12/2010	11:13:55 AM	PH3 valve closed
7/12/2010	11:13:55 AM	SiCl4 pre valve closed
7/12/2010	11:13:56 AM	SiCl4 post valve closed
7/12/2010	11:13:56 AM	Main Vac valve closed
7/12/2010	11:13:56 AM	Bypass valve closed
7/12/2010	11:13:56 AM	Bubbler valve closed
7/12/2010	11:13:56 AM	Helium MFC set to  0.000000
7/12/2010	11:13:56 AM	H2 MFC set to  0.000000
7/12/2010	11:13:56 AM	BCl3 MFC set to  0.000000
7/12/2010	11:13:56 AM	PHl3 MFC set to  0.000000
7/12/2010	11:13:56 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:13:56 AM	Bypass solenoid MFC set to  760.000000
7/12/2010	11:13:56 AM	Tube furnace set to 0
7/12/2010	11:14:00 AM	Program exited cleanly
7/12/2010	11:14:09 AM	Recipe started at 11:14 AM
7/12/2010	11:14:09 AM	Helium valve closed
7/12/2010	11:14:09 AM	BCl3 valve closed
7/12/2010	11:14:09 AM	PH3 valve closed
7/12/2010	11:14:09 AM	SiCl4 pre valve closed
7/12/2010	11:14:09 AM	SiCl4 post valve closed
7/12/2010	11:14:09 AM	Main Vac valve closed
7/12/2010	11:14:09 AM	Bypass valve closed
7/12/2010	11:14:09 AM	Bubbler valve closed
7/12/2010	11:14:09 AM	H2 valve opened
7/12/2010	11:14:09 AM	Helium MFC set to  0.000000
7/12/2010	11:14:09 AM	H2 MFC set to  500.000000
7/12/2010	11:14:09 AM	BCl3 MFC set to  0.000000
7/12/2010	11:14:09 AM	PHl3 MFC set to  0.000000
7/12/2010	11:14:09 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:14:09 AM	Bypass solenoid MFC set to  0.000000
7/12/2010	11:14:09 AM	Tube furnace set to 0
7/12/2010	11:14:11 AM	Run aborted at 11:14 AM
7/12/2010	11:14:11 AM	Helium valve closed
7/12/2010	11:14:11 AM	H2 valve closed
7/12/2010	11:14:11 AM	BCl3 valve closed
7/12/2010	11:14:11 AM	PH3 valve closed
7/12/2010	11:14:11 AM	SiCl4 pre valve closed
7/12/2010	11:14:11 AM	SiCl4 post valve closed
7/12/2010	11:14:11 AM	Bypass valve closed
7/12/2010	11:14:11 AM	Main Vac valve closed
7/12/2010	11:14:11 AM	Bubbler valve closed
7/12/2010	11:14:11 AM	Helium MFC set to  0.000000
7/12/2010	11:14:11 AM	H2 MFC set to  0.000000
7/12/2010	11:14:11 AM	BCl3 MFC set to  0.000000
7/12/2010	11:14:11 AM	PHl3 MFC set to  0.000000
7/12/2010	11:14:11 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:14:11 AM	Tube furnace set to 0
7/12/2010	11:29:51 AM	Program started normally
7/12/2010	11:29:51 AM	Helium valve closed
7/12/2010	11:29:51 AM	H2 valve closed
7/12/2010	11:29:51 AM	BCl3 valve closed
7/12/2010	11:29:51 AM	PH3 valve closed
7/12/2010	11:29:51 AM	SiCl4 pre valve closed
7/12/2010	11:29:51 AM	SiCl4 post valve closed
7/12/2010	11:29:51 AM	Main Vac valve closed
7/12/2010	11:29:51 AM	Bypass valve closed
7/12/2010	11:29:51 AM	Bubbler valve closed
7/12/2010	11:29:51 AM	Helium MFC set to  0.000000
7/12/2010	11:29:51 AM	H2 MFC set to  0.000000
7/12/2010	11:29:51 AM	BCl3 MFC set to  0.000000
7/12/2010	11:29:51 AM	PHl3 MFC set to  0.000000
7/12/2010	11:29:51 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:29:51 AM	Bypass solenoid MFC set to  760.000000
7/12/2010	11:29:51 AM	Tube furnace set to 0
7/12/2010	11:29:52 AM	Main Vac valve opened
7/12/2010	11:29:53 AM	Main Vac valve closed
7/12/2010	11:30:04 AM	Main Vac valve opened
7/12/2010	11:30:06 AM	Bypass valve opened
7/12/2010	11:30:28 AM	Program exited cleanly
7/12/2010	11:32:05 AM	Program started normally
7/12/2010	11:32:05 AM	Helium valve closed
7/12/2010	11:32:05 AM	H2 valve closed
7/12/2010	11:32:05 AM	BCl3 valve closed
7/12/2010	11:32:05 AM	PH3 valve closed
7/12/2010	11:32:05 AM	SiCl4 pre valve closed
7/12/2010	11:32:05 AM	SiCl4 post valve closed
7/12/2010	11:32:05 AM	Main Vac valve closed
7/12/2010	11:32:05 AM	Bypass valve closed
7/12/2010	11:32:05 AM	Bubbler valve closed
7/12/2010	11:32:05 AM	Helium MFC set to  0.000000
7/12/2010	11:32:05 AM	H2 MFC set to  0.000000
7/12/2010	11:32:05 AM	BCl3 MFC set to  0.000000
7/12/2010	11:32:05 AM	PHl3 MFC set to  0.000000
7/12/2010	11:32:05 AM	SiCl4 MFC set to  0.000000
7/12/2010	11:32:05 AM	Bypass solenoid MFC set to  760.000000
7/12/2010	11:32:05 AM	Tube furnace set to 0
7/12/2010	11:32:06 AM	Main Vac valve opened
7/12/2010	11:32:07 AM	Bypass valve opened
7/12/2010	3:44:23 PM	Bypass valve closed
7/12/2010	3:44:23 PM	Main Vac valve closed
7/12/2010	3:44:36 PM	Bypass valve opened
7/12/2010	3:44:37 PM	Main Vac valve opened
7/12/2010	3:47:09 PM	Bypass valve closed
7/12/2010	3:47:10 PM	Main Vac valve closed
7/12/2010	3:48:04 PM	Main Vac valve opened
7/12/2010	3:48:05 PM	Bypass valve opened
7/12/2010	3:58:08 PM	Bypass valve closed
7/12/2010	3:58:12 PM	Main Vac valve closed
7/12/2010	3:58:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2010	3:58:39 PM	Recipe started at 3:58 PM
7/12/2010	3:58:39 PM	H2 valve closed
7/12/2010	3:58:39 PM	BCl3 valve closed
7/12/2010	3:58:39 PM	PH3 valve closed
7/12/2010	3:58:39 PM	SiCl4 pre valve closed
7/12/2010	3:58:39 PM	SiCl4 post valve closed
7/12/2010	3:58:39 PM	Main Vac valve closed
7/12/2010	3:58:39 PM	Bypass valve closed
7/12/2010	3:58:39 PM	Bubbler valve closed
7/12/2010	3:58:39 PM	Helium valve opened
7/12/2010	3:58:39 PM	Helium MFC set to  500.000000
7/12/2010	3:58:39 PM	H2 MFC set to  0.000000
7/12/2010	3:58:39 PM	BCl3 MFC set to  0.000000
7/12/2010	3:58:39 PM	PHl3 MFC set to  0.000000
7/12/2010	3:58:39 PM	SiCl4 MFC set to  0.000000
7/12/2010	3:58:39 PM	Bypass solenoid MFC set to  0.000000
7/12/2010	3:58:39 PM	Tube furnace set to 0
7/12/2010	4:00:07 PM	Helium valve closed
7/12/2010	4:00:07 PM	H2 valve closed
7/12/2010	4:00:07 PM	BCl3 valve closed
7/12/2010	4:00:07 PM	PH3 valve closed
7/12/2010	4:00:07 PM	SiCl4 pre valve closed
7/12/2010	4:00:07 PM	SiCl4 post valve closed
7/12/2010	4:00:07 PM	Main Vac valve closed
7/12/2010	4:00:07 PM	Bypass valve closed
7/12/2010	4:00:07 PM	Bubbler valve closed
7/12/2010	4:00:07 PM	Helium MFC set to  0.000000
7/12/2010	4:00:07 PM	H2 MFC set to  0.000000
7/12/2010	4:00:07 PM	BCl3 MFC set to  0.000000
7/12/2010	4:00:07 PM	PHl3 MFC set to  0.000000
7/12/2010	4:00:07 PM	SiCl4 MFC set to  0.000000
7/12/2010	4:00:07 PM	Bypass solenoid MFC set to  0.000000
7/12/2010	4:00:07 PM	Tube furnace set to 0
7/12/2010	4:00:07 PM	Run finished at 4:00 PM
7/12/2010	4:00:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/12/2010	4:00:18 PM	Helium MFC set to  500.000000
7/12/2010	4:00:22 PM	Helium valve opened
7/12/2010	4:00:26 PM	Bubbler valve opened
7/12/2010	4:02:16 PM	Bubbler valve closed
7/12/2010	4:02:19 PM	Helium valve closed
7/12/2010	4:02:25 PM	Helium MFC set to  0.000000
7/12/2010	4:02:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2010	4:02:27 PM	Recipe started at 4:02 PM
7/12/2010	4:02:27 PM	Helium valve closed
7/12/2010	4:02:27 PM	H2 valve closed
7/12/2010	4:02:27 PM	BCl3 valve closed
7/12/2010	4:02:27 PM	PH3 valve closed
7/12/2010	4:02:27 PM	SiCl4 pre valve closed
7/12/2010	4:02:27 PM	SiCl4 post valve closed
7/12/2010	4:02:27 PM	Main Vac valve closed
7/12/2010	4:02:27 PM	Bubbler valve closed
7/12/2010	4:02:27 PM	Bypass valve opened
7/12/2010	4:02:27 PM	Helium MFC set to  0.000000
7/12/2010	4:02:27 PM	H2 MFC set to  0.000000
7/12/2010	4:02:27 PM	BCl3 MFC set to  0.000000
7/12/2010	4:02:27 PM	PHl3 MFC set to  0.000000
7/12/2010	4:02:27 PM	SiCl4 MFC set to  0.000000
7/12/2010	4:02:27 PM	Bypass solenoid MFC set to  0.000000
7/12/2010	4:02:27 PM	Tube furnace set to 0
7/12/2010	4:02:51 PM	Helium valve closed
7/12/2010	4:02:51 PM	H2 valve closed
7/12/2010	4:02:51 PM	BCl3 valve closed
7/12/2010	4:02:51 PM	PH3 valve closed
7/12/2010	4:02:51 PM	SiCl4 pre valve closed
7/12/2010	4:02:51 PM	SiCl4 post valve closed
7/12/2010	4:02:51 PM	Bubbler valve closed
7/12/2010	4:02:51 PM	Main Vac valve opened
7/12/2010	4:02:51 PM	Bypass valve opened
7/12/2010	4:02:51 PM	Helium MFC set to  0.000000
7/12/2010	4:02:51 PM	H2 MFC set to  0.000000
7/12/2010	4:02:51 PM	BCl3 MFC set to  0.000000
7/12/2010	4:02:51 PM	PHl3 MFC set to  0.000000
7/12/2010	4:02:51 PM	SiCl4 MFC set to  0.000000
7/12/2010	4:02:51 PM	Bypass solenoid MFC set to  0.000000
7/12/2010	4:02:51 PM	Tube furnace set to 0
7/12/2010	4:02:51 PM	Run finished at 4:02 PM
7/12/2010	4:02:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/12/2010	4:19:42 PM	Bypass valve closed
7/12/2010	4:19:42 PM	Main Vac valve closed
7/12/2010	4:19:43 PM	Main Vac valve opened
7/12/2010	4:19:44 PM	Bypass valve opened
7/12/2010	4:19:49 PM	Main Vac valve closed
7/12/2010	4:19:52 PM	Main Vac valve opened
7/12/2010	4:19:58 PM	Tube furnace set to 1000
7/12/2010	4:20:10 PM	Tube furnace set to 0
